The optical metrology system basically covers the technical contents contained in the photometric radiance Advisory Committee (CCPR) of the International Bureau of Metrology (BIPM), and has been expanded based on the needs of scientific and Technological Development and national economy. At present, optical metrology mainly focuses on the measurement system of luminosity, radiance, chromaticity, spectral luminosity (or optical properties of materials), laser radiance, photoelectron, geometric optics and so on. With the progress of science and technology, higher requirements are put forward for the accuracy of optical metrology from the measurement accuracy to the range of measurement value.